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The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators
Residual Stress the Electromechanical Behavior Electrostatic Microactuators
2010/12/6
This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration me...