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Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics
mid-IR-laser-light scattering non-destructive inspection microelectronics
2011/9/9
Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materia...
Application of elastic mid-IR light scattering for inspection of internal gettering operations
mid-IR light scattering gettering
2011/9/9
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in
CZ Si crystals. A classification of sca...
Optical beam-induced scattering mode of mid-IR laser microscopy: a method for defect investigation in near-surface and near-interface regions of bulk semiconductors
Optical beam-induced scattering mode mid-IR laser microscopy
2011/9/9
This paper presents a new technique of optical beam-induced scattering of mid-IR-laser radiation, which is a special mode of the recently developed scanning
mid-IR-laser microscopy. The technique in ...
