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Fabrication of hydrophobic inorganic coatings on natural lotus leaves for nanoimprint stamps
Lotus leaf Ion beam sputtering Nanoimprint lithography Nanoimprint Stamps
2011/9/13
Hydrophobic inorganic films were obtained by direct deposition of copper or silicon onto natural lotus by ion beam sputtering deposition technique.Scanning electron microscopy observations showed a lo...
Low Loss Chalcogenide Glass Waveguides Fabricated By Thermal Nanoimprint Lithography
Glass waveguides Nonlinear optics integrated optics
2015/6/5
Low loss thermally nanoimprinted chalcogenide waveguides are demonstrated for the first time,uniquely using a soft PDMS stamp. Losses of 0.24dB/cm at 1550nm limited by Rayleigh scattering were achieve...
Nanoimprint Technology
Nanoimprint Technology
2009/3/12
Nanoimprint lithography is one of the promising technologies for ultra integration systems. This paper introduces some basic issues of this technology such as polymer deformation mechanisms, mold fabr...