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Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate
Laser annealing Alumina thin film Photoluminescence spectrum
2011/12/7
We analyze the effect of the laser annealing on the crystallization of Er3+ doped amorphous Al2O3 thin films deposited on the silica-on-silicon substrate. These thin films were prepared by the microwa...