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Self-Assembly of Block Copolymers by Solvent Vapor Annealing, Mechanism and Lithographic Applications
Block copolymer Lithography realtime measurement Self-assembly Solvent vapor annealing X-ray scattering
2014/11/21
Block copolymers (BCP) are a unique class of polymers, which can self-assemble into ordered microdomains with sizes from 3 nm to about 50 nm making BCPs an appealing meso-scale material. In thin films...
