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Analysis of Laser Power Threshold for Self Oscillation in Thermo-Optically Excited Doubly Supported MEMS Beams
MEMS Limit cycle Hopf bifurcation Numerical continuation Resonator
2015/8/26
An optically thin MEMS beam suspended above a substrate and illuminated with a CW laser forms an interferometer, coupling out-of-plane deflection of the beam to absorption within it. In turn, laser ab...