搜索结果: 1-1 共查到“物理学 Silicon dry oxidation kinetics”相关记录1条 . 查询时间(0.125 秒)
Silicon dry oxidation kinetics at low temperature in the nanometric range: modeling and experiment
Silicon dry oxidation kinetics low temperature modeling experiment
2011/9/14
Kinetics of silicon dry oxidation are investigated theoretically and experimentally at low temperature in the nanometer range where the limits of the Deal and Grove model becomes critical.Based on a f...