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Role of Substrate Temperature on the Structural and Morphological Properties of ZnO Thin Films Deposited by Ultrasonic Spray Pyrolysis
Zinc oxide Ultrasonic spray pyrolysis Thermodynamic study X-ray diffraction Optical properties
2010/4/9
Zinc oxide (ZnO) thin films have been prepared by ultrasonic Spray Pyrolysis (USP) technique using zinc acetate dihydrate dissolved in methanol, ethanol and deionized water. A thermodynamic analysis f...
Effects of Substrate Temperature on Properties of a-SiNx:H Films
A. Hydrogenated amorphous silicon nitride B. Substrate temperature C. Dark conductivity D. Photoconductivity E. Optical gap
2010/4/13
Hydrogenated amorphous silicon nitride films were prepared in an rf glow-discharge system by the decomposition of silane + nitrogen gas mixture at various substrate temperatures. The effects of substr...